A Method to Fabricate Taper Waveguide using Fixed Beam Moving Stage Electron-beam Lithography
, “A Method to Fabricate Taper Waveguide using Fixed Beam Moving Stage Electron-beam Lithography”, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), vol. 18, no. 4, p. 043503, 2019.
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