Heterogeneous Integration of Pb(Zr0.52 Ti 0.48)O3 thin films on SiN waveguide platform for photonic MEMS applications
, “Heterogeneous Integration of Pb(Zr0.52 Ti 0.48)O3 thin films on SiN waveguide platform for photonic MEMS applications”, Photonics 2024. Springer Nature, Kharagpur, India, 2024.
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