Demonstration of alignment error-free pattering of tapered waveguide using Fiber Beam Moving Stage e-beam lithography

V. Mere and Selvaraja, S. K., “Demonstration of alignment error-free pattering of tapered waveguide using Fiber Beam Moving Stage e-beam lithography”, SPIE Photonics West, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, vol. 10930. SPIE, San Francisco, p. 109301B, 2019.
Project: 
Nanoelectronics Network For Research and Application (NNetRA)