Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors

S. Selvarajaa et al., “Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors”, in 17th OptoElectronics and Communications Conference (OECC 2012), 2012.