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Manipulating photons at Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc).
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» Silicon nanophotonic wire structures fabricated by 193nm optical lithography
Silicon nanophotonic wire structures fabricated by 193nm optical lithography
S. Selvarajaa
et al.
,
“
Silicon nanophotonic wire structures fabricated by 193nm optical lithography
”
, in
LEOS Annual Meeting
, United States, 2007.
