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» Impact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths
Impact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths
A. Khanna
et al.
,
“
Impact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths
”
,
Optics Express
, 2014.
