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» Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits
Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits
S. Selvarajaa
,
Sleeckx, E.
,
Schaekers, M.
, and
Bogaerts, W.
,
“
Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits
”
,
Optics Communications
, vol. 313, pp. 210-216, 2014.