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Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography

S. Selvarajaa, Jaenen, P., Bogaerts, W., Dumon, P., Van Thourhout, D., and Baets, R., “Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography”, IEEE Journal of Lightwave Technology, vol. 27, pp. 4076-4083, 2009.